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中国物理学会期刊

28纳米器件电子单粒子翻转效应物理机理及特性研究

Physical Mechanisms and Characteristics of Electron-Induced Single-Event Upsets in 28-nm Bulk Devices

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  • 空间轨道环境中电子通常具有比质子更高的通量、更强的屏蔽穿透能力,并且纳米尺度下电子被证实足以引发器件单粒子翻转,从而成为影响航天器电子系统可靠性的新问题。基于28纳米体硅器件开展蒙特卡洛模拟仿真研究及电子辐照实验,揭示电子单粒子效应物理机理及特性。结果表明:器件临界电荷小于0.3fC或者电子能量小于100MeV时,直接电离是电子引发单粒子翻转的主要物理机理,直接电离产生的二次电子能量和截面受到初始电子能量的影响很小,进而使得直接电离主导下的单粒子翻转截面几乎不受入射电子能量影响。只有当器件临界电荷大于0.4fC且电子能量大于1000MeV时,电子与原子核的弹性碰撞产生的反冲核以及电子引发核反应产生的次级粒子间接电离才成为引发单粒子翻转的重要原因。而器件临界电荷小于0.2fC时,电子在典型地球轨道引发器件单粒子翻转的贡献将超过质子,因此直接电离是最值得关注的电子单粒子效应机理。

    Single-event effects (SEEs) induced by heavy ions and high-energy protons have long been recognized as the primary causes of electronic system failures in spacecraft. However, in the space orbital environment, electrons typically exhibit higher flux and stronger shielding penetration capabilities than protons. Furthermore, at the nanoscale, electrons have been proven capable of inducing single-event upsets (SEUs) in devices. Electron-induced SEEs have emerged as a new issue affecting the reliability of spacecraft electronic systems. Research in this area is still in its infancy, and there is no consensus yet on the primary physical mechanisms of electron-induced SEEs. In this paper, based on 28-nanometer bulk silicon devices, we reveal the physical mechanisms and characteristics of electron-induced SEEs through Monte Carlo simulations and electron irradiation experiments. The results indicate that direct ionization is the main physical mechanism for electron-induced SEUs when the device's critical charge is less than 0.3 fC or the electron energy is less than 100 MeV. The energy and cross-section of secondary electrons generated by direct ionization of electrons in materials are minimally influenced by the initial electron energy. Therefore, when direct ionization is the primary mechanism, the SEU cross-section remains almost unaffected by the incident electron energy. Only when the device's critical charge is greater than 0.4 fC and the electron energy exceeds 1000 MeV do the recoil nuclei generated by elastic collisions between electrons and atomic nuclei, as well as the secondary particles produced by electron-induced nuclear reactions, become important factors in inducing SEUs. In such cases, indirect ionization becomes a significant mechanism for electron-induced SEUs and the SEU cross-section increases with higher incident electron energy. Compared to perpendicular incidence, electrons incident at smaller angles result in a larger SEU cross-section when the device's critical charge is low. However, the influence of the electron incidence angle on the SEU cross-section diminishes as the device's critical charge increases. As the device's critical charge decreases, the SEU cross-sections induced by electrons of various energies increase exponentially. When the device's critical charge is less than 0.2 fC, the contribution of electrons to SEUs in typical Earth orbits exceeds that of protons. Therefore, direct ionization is the most critical physical mechanism of electron-induced SEUs.

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