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中国物理学会期刊

高频高功率氮化镓射频电子器件研究发展综述

A Review of the Research and Development of High-Frequency, High-Power Gallium Nitride RF Electronic Devices

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  • 为满足5G/6G通信与先进雷达系统对高频、高功率射频电子器件的迫切需求,氮化镓(GaN)基射频电子器件正经历从横向结构向纵向结构的关键技术演进。本文系统梳理了GaN基射频器件从平面横向拓扑向纵向体输运结构演进的技术脉络。针对传统高电子迁移率晶体管(HEMT)面临的短沟道效应及“耐压-面积”强耦合瓶颈,本文探讨了其通过新型宽禁带势垒材料的极化能带工程,结合N极性面与三维栅控(FinFET)架构,优化载流子输运特性的演进路径。进一步,深入探讨了基于体材料垂直输运的纵向器件的优势,着重剖析了GaN基异质结双极型晶体管(HBT)在大信号线性度方面的潜力,以及热电子晶体管(HET)借助纳米基区准弹道输运机制实现太赫兹频段工作的物理基础。最后,面对极高频与极端功率应用场景,本文指明了GaN射频技术的未来演进轨迹,并对横纵向器件的互补发展以及系统级异构集成的前沿方向进行了深度评述与展望。

    The relentless push toward 6G communications and advanced radar systems demands unprecedented power and frequency metrics from radio-frequency (RF) front-ends. While gallium nitride (GaN) remains the undisputed cornerstone of high-power RF electronics, traditional lateral architectures are colliding with fundamental physical scaling limits. This review systematically maps the evolutionary trajectory of GaN RF devices, spotlighting the critical paradigm shift from lateral surface conduction to vertical bulk and quasi-ballistic transport mechanisms. We first critically assess the physical bottlenecks of lateral high-electron-mobility transistors (HEMTs)—specifically the severe short-channel and localized thermal hotspot effects near the 20-nm gate limit. To mitigate these, we evaluate recent structural interventions, including polarization-driven barrier engineering and 3D FinFET topologies. To transcend planar constraints, we detail the transition toward vertical architectures designed to fundamentally decouple breakdown voltage from the device footprint. For heterojunction bipolar transistors (HBTs), recent breakthroughs in non-destructive epitaxial growth and tunnel-junction contacts are highlighted for conquering long-standing p-GaN ohmic challenges. Furthermore, we explore the frontier of hot-electron transistors (HETs), where nanometer-scale bases enable quasi-ballistic transport to unlock the terahertz (THz) regime. Ultimately, the future of GaN RF electronics hinges not on further geometric miniaturization, but on vertical topological innovations and system-level heterogeneous integration, forging the indispensable hardware foundation for next-generation extreme-power applications.

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