搜索

x
中国物理学会期刊

芯片热设计模拟、测量技术及发展综述

CSTR:32037.14.aps.75.20251780

A review of simulation, measurement techniques, and development in chip thermal design

CSTR:32037.14.aps.75.20251780
PDF
HTML
导出引用
  • 随着集成电路技术向高功率密度、3D 集成电路及异构封装发展, 芯片的热管理问题已成为限制芯片性能、可靠性及寿命的关键瓶颈. 本文系统综述了芯片热设计中的数值模拟方法与实验测量技术, 重点分析了现有技术在多尺度、多物理场耦合、界面热阻测量及高热流密度冷却中的瓶颈. 首先介绍了宏观与器件级热模拟方法, 如等效热路模型、有限元法及计算流体力学, 并探讨了声子输运与分子动力学在微观尺度中的应用. 随后, 分析了红外热成像、热反射法、拉曼光谱和嵌入式传感器等实验手段的优势与挑战. 本文还探讨了当前技术的局限性, 包括计算量巨大、多尺度耦合不精确、实验设备昂贵以及冷却技术的物理极限. 最后, 提出了未来研究方向, 特别是AI加速的热模拟、嵌入式微通道液冷、两相流冷却、新型高导热材料及多物理场协同设计等前沿技术, 以推动芯片热管理技术向更高效、智能化方向发展.

    Driven by the rapid evolution of integrated circuits toward higher power density, 2.5D/3D integration, chiplet-based architectures, and heterogeneous packaging, thermal management has emerged as a primary constraint on performance, reliability, and lifetime. This review provides a structured synthesis of the state of the art in chip thermal design by i) organizing numerical models across length scales, ii) summarizing experimental temperature and thermophysical-property characterization methods, and iii) critically analyzing the major bottlenecks that limit predictive accuracy under extreme heat-flux conditions. On the modeling side, we compare fast architecture-level approaches (equivalent RC thermal networks) with high-fidelity package- and system-level solvers (finite-element/finite-volume methods and conjugate heat-transfer CFD), and extend the discussion to micro-/nanoscale heat transport where non-Fourier effects become important, including phonon Boltzmann transport formulations and molecular dynamics for interfacial thermal boundary resistance. On the measurement side, we summarize the operating principles, spatiotemporal resolution, and applicability of infrared thermography, thermoreflectance microscopy, Raman thermometry, and embedded on-chip sensors, and highlight how these techniques are used to calibrate power maps, boundary conditions, and interface parameters for simulation–experiment closed-loop validation. Based on the literature, we identify recurring challenges: the prohibitive cost of full-chip transient multi-physics simulation, uncertainties in material properties and interfaces, limited simultaneous spatial and temporal resolution in experiments, and the approaching physical and practical limits of conventional air/heat-pipe cooling. Finally, we discuss emerging directions that can address these gaps, including AI-accelerated surrogate modeling and physics-informed learning for rapid thermal prediction, embedded microchannel and two-phase cooling for ultra-high heat flux, advanced high-thermal-conductivity interface/packaging materials, and multi-physics co-design that couples device, package, and cooling-system optimization.

    目录

    返回文章
    返回