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中国物理学会期刊

基于磁性材料的柔性器件:材料体系、制造方法与应用进展

Flexible Devices Based on Magnetic Materials: Material Systems, Manufacturing Methods and Applications

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  • 柔性电子技术的快速发展推动了传感与交互系统向可弯曲、可拉伸与可贴附形态演进。相较传统电学传感,基于磁性材料的柔性器件具有磁场可远程读出、信号可穿透封装与隔离介质、磁场分布可编程等优势,为复杂环境下的稳定感知与非接触交互提供新方案。然而,磁性材料在“高磁性能”与“高机械顺应性”之间存在内在矛盾:磁畴结构、磁各向异性及层间耦合在形变与循环载荷下易演化,引发漂移、滞后与可靠性衰减。本文围绕“材料—制造—应用”主线系统综述相关进展:首先总结软磁、硬磁与超顺磁材料的核心磁学特性及柔性化策略,明确其在磁场读出、内置磁源与生物相关磁效应中的功能定位;其次阐释复合磁性材料的磁—力—电耦合机制与界面工程,并归纳体相混合/共混复合、薄膜沉积与原子层沉积等制造路线;进一步梳理磁敏电子皮肤、人体健康监测、多维触觉界面与智能软体机器人等应用与系统集成框架。最后指出未来需在材料—界面—工艺协同、信号稳定性与抗噪读出、以及规模化制造与标定算法一体化方面持续突破,推动器件从原型走向可部署应用。

    Flexible electronics are transforming sensing, actuation, and human–machine interaction from rigid, planar platforms into compliant systems that can conform to skin, soft tissues, and complex curvilinear surfaces. Within this rapidly evolving field, magnetic-material-based flexible devices have attracted increasing attention because they offer several capabilities that are difficult to achieve simultaneously with conventional resistive, capacitive, piezoelectric, or optical approaches, including remote readout, tolerance to encapsulation and intervening media, programmable field distributions, and robust operation in sealed, wet, contaminated, or sterile environments. These unique features make magnetic flexible systems particularly attractive for wearable monitoring, electronic skin, tactile interfaces, biomedical devices, and soft robotics. However, their development is fundamentally constrained by the intrinsic tension between magnetic performance and mechanical compliance: materials with strong and stable magnetic responses are often rigid or brittle, whereas highly deformable matrices tend to dilute, destabilize, or complicate magnetic functionality.
    This review provides a systematic overview of recent progress in magnetic-material-enabled flexible devices through an integrated framework spanning material systems, manufacturing strategies, and application scenarios. First, we summarize the magnetic material platforms used in flexible systems, including soft magnetic materials for flux guidance, field concentration, and low-coercivity sensing; hard magnetic composites for remanent field generation, information encoding, and magnetic torque output; and superparamagnetic nanoparticles for nanoscale magnetic manipulation, magnetic heating, and biomedical compatibility. Their distinct magnetic response mechanisms are discussed in relation to deformation tolerance, signal stability, and device function. Second, we compare the major manufacturing routes for flexible magnetic devices, including particle mixing and casting for bulk composites, thin-film deposition and transfer integration for high-performance magnetic layers, as well as micro/nanostructuring and additive manufacturing for programmable architectures. Particular attention is paid to critical engineering issues such as particle dispersion, interfacial adhesion, stress transfer, magnetic anisotropy evolution, encapsulation, and the long-term reliability of devices under repeated bending, stretching, and cyclic loading.
    We further analyze representative applications in four major categories: magnetic electronic skin for sealed touch and touchless interaction, health monitoring systems for wireless or low-power biomechanical signal acquisition, tactile interfaces capable of multidimensional force reconstruction, and magnetically actuated soft robotic systems for remote and spatially selective control. Beyond these major directions, emerging applications in electromagnetic functional materials, industrial inspection, and biointegrated systems are also highlighted. Across these examples, a common theme emerges: magnetic flexible devices are most powerful when their material response, structural design, and readout strategy are co-optimized rather than developed independently. In particular, programmable magnetization, distributed magnetic architectures, and data-assisted signal decoding are becoming increasingly important for improving sensitivity, decoupling capability, environmental robustness, and scalability.
    Overall, this review shows that magnetic flexible devices represent not merely a magnetic extension of conventional flexible electronics, but a distinct technological route with unique physical advantages and system-level possibilities. At the same time, several bottlenecks remain before broad practical deployment can be achieved, including the difficulty of simultaneously maximizing magnetic functionality and softness, drift caused by stress-induced anisotropy changes and interfacial degradation, insufficient understanding of deformation-dependent magnetic behavior, and challenges in scalable manufacturing and low-power integrated readout. Future progress will require coordinated advances in material design, multiscale structural engineering, stable magnetization strategies, compensation and inversion models, and standardized reliability evaluation. Addressing these issues will be essential for translating magnetic flexible devices from proof-of-concept demonstrations to deployable platforms in healthcare, human–machine interaction, and intelligent soft systems.

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