With the rise and wide applications of 3D heterogeneous integration technology, inductive voltage regulators have become increasingly important for mobile terminals and high-computing-power devices, while also offering significant development opportunities for high-frequency soft magnetic films. Based on the requirements of onchip power inductors, we first review the advantages and limitations of three types of magnetic core films: permalloy, ·Co-based amorphous metallic films, and FeCo-based nanogranular composite films, with a focus on the technical requirements and challenges posed by several μm-thick laminated magnetic core films. Secondly, almost all on-chip inductors are hard-axis excited, meaning that the field of inductors should be parallel to the hard axis of the magnetic core. We thus compare the characteristics of two types of large-area film fabrication methods, i.e. applying in-situ magnetic field and oblique sputtering, both of which can effectively induce in-plane uniaxially magnetic anisotropy (IPUMA). Their impacts on the static and high-frequency soft magnetic properties are also compared. The influence of film patterning on the domain structures and highfrequency magnetic losses of magnetic cores, as well as corresponding countermeasures, are also briefly analyzed. Furthermore, the temperature stability of magnetic permeability and anisotropy of magnetic core films is discussed from the perspectives of process compatibility and long-term reliability. Although the Curie temperature and crystallization temperature of the three types of magnetic core films are relatively high, the upper limits of their actual process temperatures are affected by the thermal effects on the alignment of magnetic atomic pairs, microstructural defects, and grain size. Finally, the current bottlenecks in testing high-frequency and large-signal magnetic losses of magnetic core films are addressed, and potential technical approaches for achieving magnetic core films that meet the future demands of on-chip power inductors for higher saturation current and lower magnetic losses are outlined.