Investigation of silicon breakdown in through-silicon via fabrication with multi-wavelength femtosecond lasers

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LIU Junming; QIU Longxiang; LIU Liqiang; LI Zhiyuan

doi:10.7498/aps.75.20260160

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LIU Junming, QIU Longxiang, LIU Liqiang, LI Zhiyuan. Investigation of silicon breakdown in through-silicon via fabrication with multi-wavelength femtosecond lasers. Acta Physica Sinica, 2026, 75(13): 130404. DOI: 10.7498/aps.75.20260160

Citation:

LIU Junming, QIU Longxiang, LIU Liqiang, LI Zhiyuan. Investigation of silicon breakdown in through-silicon via fabrication with multi-wavelength femtosecond lasers. Acta Physica Sinica, 2026, 75(13): 130404. DOI: 10.7498/aps.75.20260160

Citation:

LIU Junming, QIU Longxiang, LIU Liqiang, LI Zhiyuan. Investigation of silicon breakdown in through-silicon via fabrication with multi-wavelength femtosecond lasers. Acta Physica Sinica, 2026, 75(13): 130404. DOI: 10.7498/aps.75.20260160