ZHAO Yueyue; MIAO Yang; YANG Wei; DU Chengran

doi:10.7498/aps.74.20251096

Abstract

Low-pressure radio-frequency inductively coupled discharges can produce uniformly distributed monodisperse particles and plasma, making them widely used in nanodevice fabrication. The manufacturing of nanodevices typically requires the generation of particles ranging from nanometer to submicron scales. These particles usually carry negative charges and can significantly influence the discharge characteristics of the plasma. This study investigates the effects of particle size and density on electron bounce resonance heating (BRH) and fundamental plasma properties in low-pressure inductively coupled plasmas (ICPs) by using a hybrid model. The hybrid model consists of kinetic equation, electromagnetic field equation, and global model equation. The simulation results show that as the dust radius or density increases, the BRH effect characterized by the formation of a plateau in the probability function of electron energy, is gradually suppressed and eventually disappears, accompanied by a decrease in electron temperature, an increase in electron density, and an increase in particle surface potential. The dust charge decreases with the increase of particle density, while exhibiting a nonmonotonic variation with particle radius. The results show that the loss of high-energy electrons caused by the dust particles may create a more favorable plasma environment for the growth of monodisperse nanoparticles with low defects. Such an improvement in particle quality is crucial for reducing trap densities and enhancing the electrical performance of nanoparticle-based electronic devices.

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Authors and contacts

Corresponding author: YANG Wei, weiyang@dhu.edu.cn

Funds: Project supported by the National Natural Science Foundation of China (Grant No. 12035003).

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Vol. 74, Issue 20 - 2025-10-20

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