[1] |
Li Xiu-Hua, Zhang Min, Yang Jia, Xing Shuang, Gao Yue, Li Ya-Ze, Li Si-Yu, Wang Chong-Jie.Effect of film thickness on photoelectric properties of
${\boldsymbol{\beta}} $
-Ga2O3films prepared by radio frequency magnetron sputtering. Acta Physica Sinica, 2022, 71(4): 048501.doi:10.7498/aps.71.20211744 |
[2] |
Xuan Xin-Miao, Wang Jia-Heng, Mao Yan-Qi, Ye Li-Juan, Zhang Hong, Li Hong-Lin, Xiong Yuan-Qiang, Fan Si-Qiang, Kong Chun-Yang, Li Wan-Jun.Flexible transparent solar blind ultraviolet photodetector based on amorphous Ga2O3grown on mica substrate. Acta Physica Sinica, 2021, 70(23): 238502.doi:10.7498/aps.70.20211039 |
[3] |
.Effect of film thickness on photoelectric properties of β-Ga2O3 films by radio frequency magnetron sputtering*. Acta Physica Sinica, 2021, (): .doi:10.7498/aps.70.20211744 |
[4] |
Zhang Fan, Xu Yong, Liu Yang, Cheng Hou-Yi, Zhang Xiao-Qiang, Du Yin-Chang, Wu Xiao-Jun, Zhao Wei-Sheng.Terahertz emission generated from Bi2Te3/CoFeB heterostructures grown by magnetron sputtering. Acta Physica Sinica, 2020, 69(20): 200705.doi:10.7498/aps.69.20200634 |
[5] |
Feng Qiu-Ju, Pan De-Zhu, Xing Yan, Shi Xiao-Chi, Yang Yu-Qi, Li Fang, Li Tong-Tong, Guo Hui-Ying, Liang Hong-Wei.Growth, structural and optical properties of orderly SnO2 microhemispheres on patterned sapphire substrates. Acta Physica Sinica, 2017, 66(3): 038101.doi:10.7498/aps.66.038101 |
[6] |
Ma Li-An, Zheng Yong-An, Wei Zhao-Hui, Hu Li-Qin, Guo Tai-Liang.Effect of synthesis temperature and N2/O2 flow on morphology and field emission property of SnO2 nanowires. Acta Physica Sinica, 2015, 64(23): 237901.doi:10.7498/aps.64.237901 |
[7] |
Peng Jin, Chen Guang-Qi, Song Yi-Chi, Gu Kun-Ming, Tang Jiao-Ning.Study on electrical performance of metal copper films deposited by magnetron sputtering on polyimide flexible substrates. Acta Physica Sinica, 2014, 63(13): 138101.doi:10.7498/aps.63.138101 |
[8] |
Zhang Chuan-Jun, Wu Yun-Hua, Cao Hong, Gao Yan-Qing, Zhao Shou-Ren, Wang Shan-Li, Chu Jun-Hao.Effects of different substrates and CdCl2 treatment on the properties of CdS thin films deposited by magnetron sputtering. Acta Physica Sinica, 2013, 62(15): 158107.doi:10.7498/aps.62.158107 |
[9] |
Zhang Chi, Chen Xin-Liang, Wang Fei, Yan Cong-Bo, Huang Qian, Zhao Ying, Zhang Xiao-Dan, Geng Xin-Hua.Temperature-dependant growth and properties of W-doped ZnO thin films deposited by reactive magnetron sputtering. Acta Physica Sinica, 2012, 61(23): 238101.doi:10.7498/aps.61.238101 |
[10] |
He Jing-Jing, Liu Wei, Li Zhi-Guo, Li Bo-Yan, Han An-Jun, Li Guang-Min, Zhang Chao, Zhang Yi, Sun Yun.Research on sodium incorporation methods of growing Cu(In-Ga)Se2 thin film by low-temperature deposition. Acta Physica Sinica, 2012, 61(19): 198801.doi:10.7498/aps.61.198801 |
[11] |
Xie Jing, Li Bing, Li Yuan-Jie, Yan Pu, Feng Liang-Huan, Cai Ya-Ping, Zheng Jia-Gui, Zhang Jing-Quan, Li Wei, Wu Li-Li, Lei Zhi, Zeng Guang-Gen.Study of ZnS thin films prepared by RF magnetron sputtering technique. Acta Physica Sinica, 2010, 59(8): 5749-5754.doi:10.7498/aps.59.5749 |
[12] |
Wang Pei-Jun, Jiang Mei-Fu, Du Ji-Long, Dai Yong-Feng.Frictional properties of fluorinated diamond-like carbon films prepared by radio frequency reactive magnetron sputtering. Acta Physica Sinica, 2010, 59(12): 8920-8926.doi:10.7498/aps.59.8920 |
[13] |
Cai Hong-Kun, Tao Ke, Wang Lin-Shen, Zhao Jing-Fang, Sui Yan-Ping, Zhang De-Xian.Interface treatment of amorphous silicon thin film solar cells on flexible substrate. Acta Physica Sinica, 2009, 58(11): 7921-7925.doi:10.7498/aps.58.7921 |
[14] |
Xia Ai-Lin, Han Bao-Shan.Comparison of magnetic properties of Fe/Co multilayers prepared by DC magnetron sputtering on glass and Si substrates. Acta Physica Sinica, 2008, 57(1): 545-549.doi:10.7498/aps.57.545 |
[15] |
.Nano-β-FeSi2/a-Si multi-layered structure prepared by magnetron sputtering. Acta Physica Sinica, 2007, 56(12): 7188-7194.doi:10.7498/aps.56.7188 |
[16] |
Feng Xian-Jin, Ma Jin, Ge Song-Hua, Ji Feng, Wang Yong-Li, Yang Fan, Ma Hong-Lei.Structural and photoluminescence properties for SnO2:Sb films prepared on Al2O3 substrate. Acta Physica Sinica, 2007, 56(8): 4872-4876.doi:10.7498/aps.56.4872 |
[17] |
Zhang Xi-Jian, Ma Hong-Lei, Wang Qing-Pu, Ma Jin, Zong Fu-Jian, Xiao Hong-Di, Ji Feng.Structural and optical properties of MgxZn1-xO thin films deposited by radio frequency magnetron sputtering. Acta Physica Sinica, 2005, 54(9): 4309-4312.doi:10.7498/aps.54.4309 |
[18] |
Wang Yu-Heng, Ma Jin, Ji Feng, Yu Xu-Hu, Zhang Xi-Jian, Ma Hong-Lei.Structural and photoluminescence characters of SnO22:Sb thin films pr epared by rf magnetron sputtering. Acta Physica Sinica, 2005, 54(4): 1731-1735.doi:10.7498/aps.54.1731 |
[19] |
ZHAO KUN, ZHU FENG, WANG LI-FANG, MENG TIE-JUN, ZHANG BAO-CHENG, ZHAO KUI.INVESTIGATIONS OF TiO2 FILMS PREPARED BY REACTIVE MAGNETRON SPUTTERING. Acta Physica Sinica, 2001, 50(7): 1390-1395.doi:10.7498/aps.50.1390 |
[20] |
YANG ZHI-WEI, HAN SHENG-HAO, YANG TIAN-LIN, ZHAO JUN-QING, MA JIN, MA HONG-LEI, CHENG CHUAN-FU.PREPARATION OF ITO FILMS ON WATER-COOLED FLEXIBLE SUBSTRATE BY BIAS R.F. MAGNETRON SPUTTERING. Acta Physica Sinica, 2000, 49(6): 1196-1201.doi:10.7498/aps.49.1196 |