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Zhang Yu-Han, Zhao Xin-Qian, Liang Ying-Shuang, Guo Yuan-Yuan.Numerical simulation of inductively coupled Ar/O2plasma. Acta Physica Sinica, 2024, 73(13): 135201.doi:10.7498/aps.73.20240436 |
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Tong Lei, Zhao Ming-Liang, Zhang Yu-Ru, Song Yuan-Hong, Wang You-Nian.Hybrid simulation of radio frequency biased inductively coupled Ar/O2/Cl2plasmas. Acta Physica Sinica, 2024, 73(4): 045201.doi:10.7498/aps.73.20231369 |
[3] |
Duan Meng-Yue, Jia Wen-Zhu, Zhang Ying-Ying, Zhang Yi-Fan, Song Yuan-Hong.Two-dimensional fluid simulation of spatial distribution of dust particles in a capacitively coupled silane plasma. Acta Physica Sinica, 2023, 72(16): 165202.doi:10.7498/aps.72.20230686 |
[4] |
Song Liu-Qin, Jia Wen-Zhu, Dong Wan, Zhang Yi-Fan, Dai Zhong-Ling, Song Yuan-Hong.Numerical investigation of SiO2film deposition enhanced by capacitively coupled discharge plasma. Acta Physica Sinica, 2022, 71(17): 170201.doi:10.7498/aps.71.20220493 |
[5] |
Zhang Yu-Ru, Gao Fei, Wang You-Nian.Numerical investigation of low pressure inductively coupled plasma sources: A review. Acta Physica Sinica, 2021, 70(9): 095206.doi:10.7498/aps.70.20202247 |
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Wang Li, Wen De-Qi, Tian Chong-Biao, Song Yuan-Hong, Wang You-Nian.Electron heating dynamics and plasma parameters control in capacitively coupled plasma. Acta Physica Sinica, 2021, 70(9): 095214.doi:10.7498/aps.70.20210473 |
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Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Lu Man-Ting, Xin Yu.Axial diagnosis of radio-frequency capacitively coupled Ar/O2plasma. Acta Physica Sinica, 2021, 70(11): 115204.doi:10.7498/aps.70.20202113 |
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Zhou Yu, Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Xin Yu.Diagnosis of capacitively coupled plasma driven by pulse-modulated 27.12 MHz by using an emissive probe. Acta Physica Sinica, 2020, 69(8): 085201.doi:10.7498/aps.69.20191864 |
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Zhang Gai-Ling, Hua Yue, Hao Ze-Yu, Ren Chun-Sheng.Experimental investigation of plasma parameters in 13.56 MHz/2 MHz cylindrical inductively coupled plasma. Acta Physica Sinica, 2019, 68(10): 105202.doi:10.7498/aps.68.20190071 |
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Yang Yu, Tang Cheng-Shuang, Zhao Yi-Fan, Yu Yi-Qing, Xin Yu.Electronegativity of capacitively coupled Ar+O2 plasma excited at very high frequency. Acta Physica Sinica, 2017, 66(18): 185202.doi:10.7498/aps.66.185202 |
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Wang Jun, Wang Tao, Tang Cheng-Shuang, Xin Yu.Evolution of electron energy distribution function in capacitively coupled argon plasma driven by very high frequency. Acta Physica Sinica, 2016, 65(5): 055203.doi:10.7498/aps.65.055203 |
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Wei Xiao-Long, Xu Hao-Jun, Li Jian-Hai, Lin Min, Song Hui-Min.Experimental investigation and parameter diagnosis of air high-pressure ring-shaped inductively coupled plasma. Acta Physica Sinica, 2015, 64(17): 175201.doi:10.7498/aps.64.175201 |
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Du Yong-Quan, Liu Wen-Yao, Zhu Ai-Min, Li Xiao-Song, Zhao Tian-Liang, Liu Yong-Xin, Gao Fei, Xu Yong, Wang You-Nian.Phase resolved optical emission spectroscopy of dual frequency capacitively coupled plasma. Acta Physica Sinica, 2013, 62(20): 205208.doi:10.7498/aps.62.205208 |
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Hong Bu-Shuang, Yuan Tao, Zou Shuai, Tang Zhong-Hua, Xu Dong-Sheng, Yu Yi-Qing, Wang Xu-Sheng, Xin Yu.Influence of addifion of electronegative gases on the properties of capacitively coupled Ar plasmas. Acta Physica Sinica, 2013, 62(11): 115202.doi:10.7498/aps.62.115202 |
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Zou Shuai, Tang Zhong-Hua, Ji Liang-Liang, Su Xiao-Dong, Xin Yu.Application of floating microwave resonator probe to the measurement of electron density in electronegative capacitively coupled plasma. Acta Physica Sinica, 2012, 61(7): 075204.doi:10.7498/aps.61.075204 |
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Jiang Xiang-Zhan, Liu Yong-Xin, Bi Zhen-Hua, Lu Wen-Qi, Wang You-Nian.Radial density uniformity of dual frequency capacitively coupled plasma. Acta Physica Sinica, 2012, 61(1): 015204.doi:10.7498/aps.61.015204 |
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Du Yin-Chang, Cao Jin-Xiang, Wang Jian, Zheng Zhe, Liu Yu, Meng Guang, Ren Ai-Min, Zhang Sheng-Jun.Mode transition of inductively coupled plasma in interlayer chamber. Acta Physica Sinica, 2012, 61(19): 195206.doi:10.7498/aps.61.195206 |
[18] |
Liu Feng, Meng Yue-Dong, Ren Zhao-Xing, Shu Xing-Sheng.Characterization of ZrN films deposited by ICP enhanced RF magnetron sputtering. Acta Physica Sinica, 2008, 57(3): 1796-1801.doi:10.7498/aps.57.1796 |
[19] |
Yuan Qiang-Hua, Xin Yu, Huang Xiao-Jiang, Sun Kai, Ning Zhao-Yuan.Effect of 13.56MHz low-frequency power on electrical characteristic of 60MHz radio-frequency capacitively coupled plasma. Acta Physica Sinica, 2008, 57(11): 7038-7043.doi:10.7498/aps.57.7038 |
[20] |
CHEN XIAO-HUA, WU GUO-TAO, DENG FU-MING, WANG JIAN-XIONG, YANG HANG-SHENG, WANG MIAO, LU XIAO-NAN, PENG JING-CUI, LI WEN-ZHU.GROWING CARBON BUCKONIONS BY RADIO FREQUENCY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION. Acta Physica Sinica, 2001, 50(7): 1264-1267.doi:10.7498/aps.50.1264 |