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Abstract

Based on the laser manipulation of electron beam, the steady-state micro-bunching (SSMB) mechanism promises an electron bunch length six orders of magnitude smaller than that in a conventional storage ring. With the combination of the strong coherent characteristic of the radiation from micro-bunching and the high repetition rate of a storage ring, high-average-power, narrow-band coherent radiation with wavelengths ranging from THz to soft X-ray can be expected from an SSMB ring. Such a novel light source can provide unprecedented opportunities for accelerator photon science and industry applications like extreme ultraviolet (EUV) lithography. In this paper, the SSMB concept and its potential, the progress of SSMB proof-of-principle experiment, the key physics issues and technical challenges of an SSMB ring, the Tsinghua SSMB-EUV light source and its potential revolutionary influence on scientific research and EUV lithography are all reviewed. Some important results of the SSMB research achieved by us are also presented.

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Authors and contacts

Corresponding author:Tang Chuan-Xiang,tang.xuh@tsinghua.edu.cn

Funds:Project supported by the Tsinghua University Initiative Scientific Research Program, China (Grant No. 20191081195) and the National Natural Science Foundation of China (Grant No. 12035010)

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技术参数	单位	设计指标
储存环周长	m	100—150
电子束能量	MeV	$\geqslant 400$
束流强度	A	$\geqslant 1$
辐射波长	nm	5—100
13.5 nm EUV功率 (2%带宽内)	kW	$\geqslant 1$
13.5 nm EUV峰值/ 平均亮度	phs/s/mm²/mrad²/ 0.1%b.w.	$> 10^{23}$

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光源原理	主要特点
LPP	技术成熟, 已商业化, EUV光功率最高500 W左右, 难以支撑下一代光刻技术的进一步发展
SR	技术成熟, 成本较低, 但EUV光功率达不到EUV光刻大规模量产需求
SRF-FEL	EUV光功率可达1—10 kW量级, 造价相对高昂(数十亿), 规模较大(数百米),
SRF-FEL	商业化必须做能量回收(ERL), 实现大功率EUV输出, 还需许多技术突破
SSMB	EUV光功率可大于1 kW, 造价(数亿到十亿)及规模(周长$100—150$ m)适中,
	作为一种全新的光源原理, 原理实验验证已经实现, 需要建设运行在EUV波段的
	SSMB加速器光源研究装置, 培养科学及产业用户, 并提高其技术成熟度

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Vol. 71, Issue 15 - 2022-08-05

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