[1] |
Gao Jian-Ying, Li Yu-Ge, Lei Ming-Kai.Plasma characteristics in deep oscillation magnetron sputtering of chromium target. Acta Physica Sinica, 2024, 73(16): 165201.doi:10.7498/aps.73.20240364 |
[2] |
Huang Jiu-Huan, Gao Fei, Wang You-Nian.Effect of pressure on discharge mode transition in radio-frequency capacitively coupled micro-beam plasmas. Acta Physica Sinica, 2021, 70(7): 075205.doi:10.7498/aps.70.20201716 |
[3] |
Zhang Ya-Rong, Han Qian-Han, Guo Ying, Zhang Jing, Shi Jian-Jun.Discharge characteristics and mechanism of plasma plume generated by atmospheric pulsed discharge. Acta Physica Sinica, 2021, 70(9): 095202.doi:10.7498/aps.70.20202246 |
[4] |
Li Ti-Jun, Cui Sui-Han, Liu Liang-Liang, Li Xiao-Yuan, Wu Zhong-Can, Ma Zheng-Yong, Ricky K. Y. Fu, Tian Xiu-Bo, Paul K. Chu, Wu Zhong-Zhen.Magnetic field optimization and high-power discharge characteristics of cylindrical sputtering cathode. Acta Physica Sinica, 2021, 70(4): 045202.doi:10.7498/aps.70.20201540 |
[5] |
Chen Chang-Zi, Ma Dong-Lin, Li Yan-Tao, Leng Yong-Xiang.Discharge model and plasma characteristics of high-power pulsed magnetron sputtering titanium target. Acta Physica Sinica, 2021, 70(18): 180701.doi:10.7498/aps.70.20202050 |
[6] |
Shen Yong-Qing, Zhang Zhi-Qiang, Liao Bin, Wu Xian-Ying, Zhang Xu, Hua Qing-Song, Bao Man-Yu.Tribocorrosion performance of Nitrogen-doped diamond like carbon coating by high power impulse magnetron sputtering technique. Acta Physica Sinica, 2020, 69(10): 108101.doi:10.7498/aps.69.20200021 |
[7] |
Cui Sui-Han, Wu Zhong-Zhen, Xiao Shu, Chen Lei, Li Ti-Jun, Liu Liang-Liang, Ricky K Y Fu, Tian Xiu-Bo, Paul K Chu, Tan Wen-Chang.Simulation study on plasma discharge and transport in cylindrical cathode controlled by expanding electromagnetic field. Acta Physica Sinica, 2019, 68(19): 195204.doi:10.7498/aps.68.20190583 |
[8] |
Hou Xing-Min, Zhang Cheng, Qiu Jin-Tao, Gu Jian-Wei, Wang Rui-Xue, Shao Tao.Properties of temporal X-ray in nanosecond-pulse discharges with a tube-to-plane gap at atmospheric pressure. Acta Physica Sinica, 2017, 66(10): 105204.doi:10.7498/aps.66.105204 |
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Cui Sui-Han, Wu Zhong-Zhen, Xiao Shu, Liu Liang-Liang, Zheng Bo-Cong, Lin Hai, Ricky K Y Fu, Tian Xiu-Bo, Paul K, Tan Wen-Chang, Pan Feng.Electromagnetic control and optimization of high power impulse magnetron sputtering discharges in cylindrical source. Acta Physica Sinica, 2017, 66(9): 095203.doi:10.7498/aps.66.095203 |
[10] |
Xiao Shu, Wu Zhong-Zhen, Cui Sui-Han, Liu Liang-Liang, Zheng Bo-Cong, Lin Hai, Ricky K Y Fu, Tian Xiu-Bo, Pan Feng, Paul K Chu.Cylindric high power impulse magnetron sputtering source and its discharge characteristics. Acta Physica Sinica, 2016, 65(18): 185202.doi:10.7498/aps.65.185202 |
[11] |
Wu Zhong-Zhen, Tian Xiu-Bo, Pan Feng, Ricky K. Y. Fu, Paul K. Chu.Enhanced discharge of high power pulsed magnetron sputtering coupling with high voltage. Acta Physica Sinica, 2014, 63(18): 185207.doi:10.7498/aps.63.185207 |
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Zhu Guo-Qiang, Jean-Pierre Boeuf, Li Jin-Xian.Effects of pressure and incident power on self-organization pattern structure during microwave breakdown in high pressure air. Acta Physica Sinica, 2012, 61(23): 235202.doi:10.7498/aps.61.235202 |
[13] |
Shen Xiang-Qian, Xie Quan, Xiao Qing-Quan, Chen Qian, Feng Yun.Computer simulation of the glow discharge characteristics in magnetron sputtering. Acta Physica Sinica, 2012, 61(16): 165101.doi:10.7498/aps.61.165101 |
[14] |
Guo Qing-Chao, Zhang Jia-Liang, Liu Li-Ying, Wang De-Zhen.Characterization on the temperature of radio frequency argon capacitive discharge mode transition at atmospheric pressure. Acta Physica Sinica, 2011, 60(2): 025207.doi:10.7498/aps.60.025207 |
[15] |
Wang Gan-Ping, Xiang Fei, Tan Jie, Cao Shao-Yun, Luo Min, Kang Qiang, Chang An-Bi.Investigation in discharge progress of a long pulse high power microwave-driven source. Acta Physica Sinica, 2011, 60(7): 072901.doi:10.7498/aps.60.072901 |
[16] |
Hao Yan-Peng, Yang Lin, Tu En-Lai, Chen Jian-Yang, Zhu Zhan-Wen, Wang Xiao-Lei.Experimental study on mode and mechanism of multi-pulse atmospheric-pressure glow discharges. Acta Physica Sinica, 2010, 59(4): 2610-2616.doi:10.7498/aps.59.2610 |
[17] |
Liu Zhi-Wen, Gu Jian-Feng, Fu Wei-Jia, Sun Cheng-Wei, Li Yong, Zhang Qing-Yu.Influence of working pressure on the crystallinity and growth behavior of ZnO films deposited by reactive radio-frequency magnetron sputtering. Acta Physica Sinica, 2006, 55(10): 5479-5486.doi:10.7498/aps.55.5479 |
[18] |
Wang Yan-Hui, Wang De-Zhen.Study on homogeneous multiple-pulse barrier discharge at atmospheric pressure. Acta Physica Sinica, 2005, 54(3): 1295-1300.doi:10.7498/aps.54.1295 |
[19] |
Wang Xin-Xin, Lu Ming-Ze, Pu Yi-Kang.Possibility of atmospheric pressure glow discharge in air. Acta Physica Sinica, 2002, 51(12): 2778-2785.doi:10.7498/aps.51.2778 |
[20] |
LOU QI-HONG.THE DELAY EFFECT OF PULSE AVALANCHE DISCHARGE PROCESSES OF XeCl LASER AT HIGH GAS PRESSURE. Acta Physica Sinica, 1985, 34(7): 960-963.doi:10.7498/aps.34.960 |