[1] |
Gao Jian-Ying, Li Yu-Ge, Lei Ming-Kai.Plasma characteristics in deep oscillation magnetron sputtering of chromium target. Acta Physica Sinica, 2024, 73(16): 165201.doi:10.7498/aps.73.20240364 |
[2] |
Zhu Yan-Rong, Chang Zheng-Shi.Effects of pulse voltage rising edge on discharge evolution of He atmospheric pressure plasma jet in dielectric tube. Acta Physica Sinica, 2022, 71(2): 025202.doi:10.7498/aps.71.20210470 |
[3] |
.Effects of Pulse Voltage Rising Edge on the Discharge Evolution of He APPJ in Dielectric Tube. Acta Physica Sinica, 2021, (): .doi:10.7498/aps.70.20210470 |
[4] |
Chen Chang-Zi, Ma Dong-Lin, Li Yan-Tao, Leng Yong-Xiang.Discharge model and plasma characteristics of high-power pulsed magnetron sputtering titanium target. Acta Physica Sinica, 2021, 70(18): 180701.doi:10.7498/aps.70.20202050 |
[5] |
Li Ti-Jun, Cui Sui-Han, Liu Liang-Liang, Li Xiao-Yuan, Wu Zhong-Can, Ma Zheng-Yong, Ricky K. Y. Fu, Tian Xiu-Bo, Paul K. Chu, Wu Zhong-Zhen.Magnetic field optimization and high-power discharge characteristics of cylindrical sputtering cathode. Acta Physica Sinica, 2021, 70(4): 045202.doi:10.7498/aps.70.20201540 |
[6] |
Shen Yong-Qing, Zhang Zhi-Qiang, Liao Bin, Wu Xian-Ying, Zhang Xu, Hua Qing-Song, Bao Man-Yu.Tribocorrosion performance of Nitrogen-doped diamond like carbon coating by high power impulse magnetron sputtering technique. Acta Physica Sinica, 2020, 69(10): 108101.doi:10.7498/aps.69.20200021 |
[7] |
Cui Sui-Han, Wu Zhong-Zhen, Xiao Shu, Chen Lei, Li Ti-Jun, Liu Liang-Liang, Ricky K Y Fu, Tian Xiu-Bo, Paul K Chu, Tan Wen-Chang.Simulation study on plasma discharge and transport in cylindrical cathode controlled by expanding electromagnetic field. Acta Physica Sinica, 2019, 68(19): 195204.doi:10.7498/aps.68.20190583 |
[8] |
Xiao Shu, Wu Zhong-Zhen, Cui Sui-Han, Liu Liang-Liang, Zheng Bo-Cong, Lin Hai, Ricky K Y Fu, Tian Xiu-Bo, Pan Feng, Paul K Chu.Cylindric high power impulse magnetron sputtering source and its discharge characteristics. Acta Physica Sinica, 2016, 65(18): 185202.doi:10.7498/aps.65.185202 |
[9] |
Chen Ming, Zhou Xi-Ying, Mao Xiu-Juan, Shao Jia-Jia, Yang Guo-Liang.Influence of external magnetic field on properties of aluminum-doped zinc oxide films prepared by RF magnetron sputtering. Acta Physica Sinica, 2014, 63(9): 098103.doi:10.7498/aps.63.098103 |
[10] |
Zhong Mian, Yang Liang, Ren Wei, Xiang Xia, Liu Xiang, Lian You-Yun, Xu Shi-Zhen, Guo De-Cheng, Zheng Wan-Guo, Yuan Xiao-Dong.Optical properties and laser damage performance of SiO2 irradiated by high-power pulsed electron beam. Acta Physica Sinica, 2014, 63(24): 246103.doi:10.7498/aps.63.246103 |
[11] |
Wu Zhong-Zhen, Tian Xiu-Bo, Pan Feng, Ricky K. Y. Fu, Paul K. Chu.Enhanced discharge of high power pulsed magnetron sputtering coupling with high voltage. Acta Physica Sinica, 2014, 63(18): 185207.doi:10.7498/aps.63.185207 |
[12] |
Wu Zhong-Zhen, Tian Xiu-Bo, Li Chun-Wei, Ricky K. Y., Fu, Pan Feng.Phasic discharge characteristics in high power pulsed magnetron sputtering. Acta Physica Sinica, 2014, 63(17): 175201.doi:10.7498/aps.63.175201 |
[13] |
Che Xue-Ke, Nie Wan-Sheng, Zhou Peng-Hui, He Hao-Bo, Tian Xi-Hui, Zhou Si-Yin.Study on continuous vortices induced by sub-microsecond pulsed surface dielectric barrier discharge plasma. Acta Physica Sinica, 2013, 62(22): 224702.doi:10.7498/aps.62.224702 |
[14] |
Jiang Qiang, Mao Xiu-Juan, Zhou Xi-Ying, Chang Wen-Long, Shao Jia-Jia, Chen Ming.Influence of applied magnetic field on properties of silicon nitride thin film with light trapping structure prepared by R.F. magnetron sputtering. Acta Physica Sinica, 2013, 62(11): 118103.doi:10.7498/aps.62.118103 |
[15] |
Shen Xiang-Qian, Xie Quan, Xiao Qing-Quan, Chen Qian, Feng Yun.Computer simulation of the glow discharge characteristics in magnetron sputtering. Acta Physica Sinica, 2012, 61(16): 165101.doi:10.7498/aps.61.165101 |
[16] |
Wang Gan-Ping, Xiang Fei, Tan Jie, Cao Shao-Yun, Luo Min, Kang Qiang, Chang An-Bi.Investigation in discharge progress of a long pulse high power microwave-driven source. Acta Physica Sinica, 2011, 60(7): 072901.doi:10.7498/aps.60.072901 |
[17] |
Mu Zong-Xin, Mu Xiao-Dong, Wang Chun, Jia Li, Dong Chuang.Analysis on the ionization of high power pulsed unbalanced magnetron sputtering powered by direct current. Acta Physica Sinica, 2011, 60(1): 015204.doi:10.7498/aps.60.015204 |
[18] |
Han Liang, Zhao Yu-Qing, Zhang Hai-Bo.The research on half-analytical method in calculating the magnetic field of unbalanced magnetron sputtering. Acta Physica Sinica, 2008, 57(2): 996-1000.doi:10.7498/aps.57.996 |
[19] |
Wang Yan-Hui, Wang De-Zhen.Study on homogeneous multiple-pulse barrier discharge at atmospheric pressure. Acta Physica Sinica, 2005, 54(3): 1295-1300.doi:10.7498/aps.54.1295 |
[20] |
Liu Lan-Qin, Peng Han-Sheng, Wei Xiao-Feng, Zhu Qi-Hua, Huang Xiao-Jun, Wang Xiao-Dong, Zhou Kai-Nan, Zeng Xiao-Ming, Wang Xiao, Guo Yi, Yuan Xiao-Dong, Peng Zhi-Tao, Tang Xiao-Dong.Compensation of gain narrowing by using AOPDF in high-power ultra-short pulse laser systems. Acta Physica Sinica, 2005, 54(6): 2764-2768.doi:10.7498/aps.54.2764 |