[1] |
Gao Jian-Ying, Li Yu-Ge, Lei Ming-Kai.Plasma characteristics in deep oscillation magnetron sputtering of chromium target. Acta Physica Sinica, 2024, 73(16): 165201.doi:10.7498/aps.73.20240364 |
[2] |
Li Ti-Jun, Cui Sui-Han, Liu Liang-Liang, Li Xiao-Yuan, Wu Zhong-Can, Ma Zheng-Yong, Ricky K. Y. Fu, Tian Xiu-Bo, Paul K. Chu, Wu Zhong-Zhen.Magnetic field optimization and high-power discharge characteristics of cylindrical sputtering cathode. Acta Physica Sinica, 2021, 70(4): 045202.doi:10.7498/aps.70.20201540 |
[3] |
Chen Chang-Zi, Ma Dong-Lin, Li Yan-Tao, Leng Yong-Xiang.Discharge model and plasma characteristics of high-power pulsed magnetron sputtering titanium target. Acta Physica Sinica, 2021, 70(18): 180701.doi:10.7498/aps.70.20202050 |
[4] |
Zhang Yun-Gang, Liu Huang-Tao, Gao Qiang, Zhu Zhi-Feng, Li Bo, Wang Yong-Da.Time-resolved spectral characteristics of SF6plasma under femtosecond laser-guided high-voltage discharge. Acta Physica Sinica, 2020, 69(18): 185201.doi:10.7498/aps.69.20200636 |
[5] |
Zhou Yu, Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Xin Yu.Diagnosis of capacitively coupled plasma driven by pulse-modulated 27.12 MHz by using an emissive probe. Acta Physica Sinica, 2020, 69(8): 085201.doi:10.7498/aps.69.20191864 |
[6] |
Shen Yong-Qing, Zhang Zhi-Qiang, Liao Bin, Wu Xian-Ying, Zhang Xu, Hua Qing-Song, Bao Man-Yu.Tribocorrosion performance of Nitrogen-doped diamond like carbon coating by high power impulse magnetron sputtering technique. Acta Physica Sinica, 2020, 69(10): 108101.doi:10.7498/aps.69.20200021 |
[7] |
Cui Sui-Han, Wu Zhong-Zhen, Xiao Shu, Chen Lei, Li Ti-Jun, Liu Liang-Liang, Ricky K Y Fu, Tian Xiu-Bo, Paul K Chu, Tan Wen-Chang.Simulation study on plasma discharge and transport in cylindrical cathode controlled by expanding electromagnetic field. Acta Physica Sinica, 2019, 68(19): 195204.doi:10.7498/aps.68.20190583 |
[8] |
Cui Sui-Han, Wu Zhong-Zhen, Xiao Shu, Liu Liang-Liang, Zheng Bo-Cong, Lin Hai, Ricky K Y Fu, Tian Xiu-Bo, Paul K, Tan Wen-Chang, Pan Feng.Electromagnetic control and optimization of high power impulse magnetron sputtering discharges in cylindrical source. Acta Physica Sinica, 2017, 66(9): 095203.doi:10.7498/aps.66.095203 |
[9] |
Xiao Shu, Wu Zhong-Zhen, Cui Sui-Han, Liu Liang-Liang, Zheng Bo-Cong, Lin Hai, Ricky K Y Fu, Tian Xiu-Bo, Pan Feng, Paul K Chu.Cylindric high power impulse magnetron sputtering source and its discharge characteristics. Acta Physica Sinica, 2016, 65(18): 185202.doi:10.7498/aps.65.185202 |
[10] |
Wu Zhong-Zhen, Tian Xiu-Bo, Li Chun-Wei, Ricky K. Y., Fu, Pan Feng.Phasic discharge characteristics in high power pulsed magnetron sputtering. Acta Physica Sinica, 2014, 63(17): 175201.doi:10.7498/aps.63.175201 |
[11] |
Du Yong-Quan, Liu Wen-Yao, Zhu Ai-Min, Li Xiao-Song, Zhao Tian-Liang, Liu Yong-Xin, Gao Fei, Xu Yong, Wang You-Nian.Phase resolved optical emission spectroscopy of dual frequency capacitively coupled plasma. Acta Physica Sinica, 2013, 62(20): 205208.doi:10.7498/aps.62.205208 |
[12] |
Chen Gen-Yu, Deng Hui, Xu Jian-Bo, Li Zong-Gen, Zhang Ling.Plasma characterization studies of laser dressing for bronze-bonded diamond wheel by a pulsed fiber laser. Acta Physica Sinica, 2013, 62(14): 144204.doi:10.7498/aps.62.144204 |
[13] |
Su Yuan-Jun, Xu Jun, Zhu Ming, Fan Peng-Hui, Dong Chuang.Hydrogenated poly-crystalline silicon thin films deposited by inductively coupled plasma assisted pulsed dc twin magnetron sputtering. Acta Physica Sinica, 2012, 61(2): 028104.doi:10.7498/aps.61.028104 |
[14] |
Liu Yuan-Xing, Liu Shi-Bing, Song Hai-Ying, He Run.Time-resolved spectrum characteristics of instantaneous plasma generation and evolution processes in nanosecond laser-Cu-target. Acta Physica Sinica, 2012, 61(4): 044204.doi:10.7498/aps.61.044204 |
[15] |
Mu Zong-Xin, Mu Xiao-Dong, Wang Chun, Jia Li, Dong Chuang.Analysis on the ionization of high power pulsed unbalanced magnetron sputtering powered by direct current. Acta Physica Sinica, 2011, 60(1): 015204.doi:10.7498/aps.60.015204 |
[16] |
Li Yang-Ping, Liu Zheng-Tang.Plasma emission diagnostics for the optimization of deposition parameters in RF magnetron sputtering of GaP film. Acta Physica Sinica, 2009, 58(7): 5022-5028.doi:10.7498/aps.58.5022 |
[17] |
Liu Feng, Meng Yue-Dong, Ren Zhao-Xing, Shu Xing-Sheng.Characterization of ZrN films deposited by ICP enhanced RF magnetron sputtering. Acta Physica Sinica, 2008, 57(3): 1796-1801.doi:10.7498/aps.57.1796 |
[18] |
Li Yong, Sun Cheng-Wei, Liu Zhi-Wen, Zhang Qing-Yu.Study of ZnO film growth by reactive magnetron sputtering using plasma emission spectra. Acta Physica Sinica, 2006, 55(8): 4232-4237.doi:10.7498/aps.55.4232 |
[19] |
Huang Song, Xin Yu, NingZhao-Yuan.Studies on C22 radical by optical emission spectroscopy in an induc tively-coupled CF44/CH44 plasma. Acta Physica Sinica, 2005, 54(4): 1653-1658.doi:10.7498/aps.54.1653 |
[20] |
Chen Gang, Pan Bai-Liang, Yao Zhi-Xin.Parametric study of plasma resistance in gas pulsed discharges. Acta Physica Sinica, 2003, 52(7): 1635-1639.doi:10.7498/aps.52.1635 |